Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Yasushi Takiguchi, Taro Yamamoto, Yoshiki Okamoto, Hayato Hosaka, Teruhiko Kodama +3 more | 2020-11-17 |
| 10573508 | Surface treatment apparatus and method for semiconductor substrate | Tatsuhiko Koide, Yoshihiro Ogawa, Hisashi Okuchi, Hiroshi Tomita | 2020-02-25 |