Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Yasushi Takiguchi, Taro Yamamoto, Yoshiki Okamoto, Hayato Hosaka, Akihiro Kubo +3 more | 2020-11-17 |
| 10649335 | Substrate processing apparatus, substrate processing method and storage medium | Masashi Enomoto, Masahide Tadokoro, Takafumi Hashimoto | 2020-05-12 |
| 10528028 | Substrate processing apparatus, substrate processing method and memory medium | Masashi Enomoto | 2020-01-07 |