Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840079 | Substrate processing apparatus, substrate processing method and storage medium | Taro Yamamoto, Yoshiki Okamoto, Hayato Hosaka, Teruhiko Kodama, Akihiro Kubo +3 more | 2020-11-17 |
| 10649334 | Liquid processing apparatus | Koki Yoshimura, Shogo Takahasi, Taro Yamamoto | 2020-05-12 |