Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10656526 | Substrate treatment method and thermal treatment apparatus | Yohei SANO, Shinichiro KAWAKAMI, Takahiro Shiozawa, Keisuke Yoshida, Tomoya ONITSUKA | 2020-05-19 |
| 10649335 | Substrate processing apparatus, substrate processing method and storage medium | Teruhiko Kodama, Masahide Tadokoro, Takafumi Hashimoto | 2020-05-12 |
| 10528028 | Substrate processing apparatus, substrate processing method and memory medium | Teruhiko Kodama | 2020-01-07 |