Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871767 | Production control system, production control program, and production control method for identifying a plurality of workpieces | — | 2020-12-22 |
| 10656526 | Substrate treatment method and thermal treatment apparatus | Shinichiro KAWAKAMI, Masashi Enomoto, Takahiro Shiozawa, Keisuke Yoshida, Tomoya ONITSUKA | 2020-05-19 |
| 10533849 | Analysis apparatus and analysis program | Yuichi Hirano | 2020-01-14 |