Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573508 | Surface treatment apparatus and method for semiconductor substrate | Tatsuhiko Koide, Shinsuke Kimura, Yoshihiro Ogawa, Hiroshi Tomita | 2020-02-25 |
| 10529588 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hiroshi Tomita, Yasuhito Yoshimizu, Hiroaki Yamada | 2020-01-07 |