Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714328 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Tomonori Harada, Katsuhiro Sato | 2020-07-14 |
| 10573508 | Surface treatment apparatus and method for semiconductor substrate | Shinsuke Kimura, Yoshihiro Ogawa, Hisashi Okuchi, Hiroshi Tomita | 2020-02-25 |