Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768529 | Proximity exposure method | Takumi Togashi | 2020-09-08 |
| 10714328 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | Tatsuhiko Koide, Katsuhiro Sato | 2020-07-14 |