Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879087 | Substrate treatment apparatus and manufacturing method of semiconductor device | Yuya Akeboshi, Fuyuma Ito, Hakuba Kitagawa | 2020-12-29 |
| 10854534 | Semiconductor device and method for manufacturing same | Yoshiro Shimojo, Shinya Arai | 2020-12-01 |
| 10804221 | Substrate treatment apparatus, method of manufacturing semiconductor device and workpiece substrate | Fuyuma Ito, Hakuba Kitagawa | 2020-10-13 |
| 10720321 | Substrate treating method and semiconductor device manufacturing method | Fuyuma Ito, Naomi Yanai | 2020-07-21 |
| 10580784 | Memory device and method for manufacturing memory device | Takaumi Morita | 2020-03-03 |
| 10573662 | Memory device and method for manufacturing memory device | — | 2020-02-25 |
| 10529588 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hiroshi Tomita, Hisashi Okuchi, Hiroaki Yamada | 2020-01-07 |