Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879087 | Substrate treatment apparatus and manufacturing method of semiconductor device | Yasuhito Yoshimizu, Yuya Akeboshi, Hakuba Kitagawa | 2020-12-29 |
| 10804221 | Substrate treatment apparatus, method of manufacturing semiconductor device and workpiece substrate | Yasuhito Yoshimizu, Hakuba Kitagawa | 2020-10-13 |
| 10720321 | Substrate treating method and semiconductor device manufacturing method | Yasuhito Yoshimizu, Naomi Yanai | 2020-07-21 |