Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854473 | Polishing method, polishing apparatus, and substrate processing system | Kenya Ito, Keisuke Uchiyama, Masayuki Nakanishi | 2020-12-01 |
| 10799917 | Substrate processing apparatus and substrate processing method | Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Masako Kodera, Hiroshi Tomita +1 more | 2020-10-13 |
| 10651057 | Apparatus and method for cleaning a back surface of a substrate | Kenichi Kobayashi, Keisuke Uchiyama | 2020-05-12 |