Issued Patents 2020
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10797804 | Communication unit and communication system | — | 2020-10-06 |
| D890825 | Substrate holding parts | Asagi Matsugu, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |
| D890824 | Substrate holding parts | Asagi Matsugu, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |
| D890823 | Substrate holding parts | Asagi Matsugu, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |
| D890822 | Substrate holding parts | Asagi Matsugu, Makoto Kashiwagi, Manao Hoshina | 2020-07-21 |
| 10700353 | Method of producing positive electrode active material for nonaqueous electrolyte secondary battery | Yukiko SANO | 2020-06-30 |
| 10651057 | Apparatus and method for cleaning a back surface of a substrate | Yu Ishii, Keisuke Uchiyama | 2020-05-12 |
| 10642171 | Imprint apparatus, imprint method, and method for producing article | Takahiro Matsumoto, Takafumi Miyaharu, Yosuke Murakami, Tatsuya Hayashi | 2020-05-05 |
| 10635072 | Imprint apparatus, method of calibrating correction mechanism, and method of manufacturing article | — | 2020-04-28 |
| 10622629 | Positive electrode active material for nonaqueous electrolyte secondary battery | Atsushi Ogawa, Soshi KAWAMURA, Toru Sukigara, Hiroto MAEYAMA | 2020-04-14 |
| 10593570 | Substrate holding module, substrate processing apparatus, and substrate processing method | Akihiro Yazawa, Kenichi Akazawa | 2020-03-17 |
| 10545098 | Foreign substance inspection apparatus, processing apparatus, and method of manufacturing article | — | 2020-01-28 |
| 10525564 | Reversing machine and substrate polishing apparatus | Kenichi Akazawa, Akihiro Yazawa, Manao Hoshina | 2020-01-07 |
| 10529986 | Method of producing positive electrode active material for nonaqueous electrolyte secondary battery | — | 2020-01-07 |