Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761316 | Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article | Ken-ichiro Shinoda, Takahiro Matsumoto, Kazuhiro Sato | 2020-09-01 |
| 10754255 | Exposure apparatus and article manufacturing method | — | 2020-08-25 |
| 10642171 | Imprint apparatus, imprint method, and method for producing article | Takahiro Matsumoto, Kenichi Kobayashi, Yosuke Murakami, Tatsuya Hayashi | 2020-05-05 |
| 10634995 | Position detector, position detection method, imprint apparatus, and product manufacturing method | Ken Minoda | 2020-04-28 |