Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859912 | Imprint apparatus, imprint method, and article manufacturing method | Masahiro Tamura | 2020-12-08 |
| 10761316 | Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing article | Takafumi Miyaharu, Takahiro Matsumoto, Kazuhiro Sato | 2020-09-01 |