Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854473 | Polishing method, polishing apparatus, and substrate processing system | Yu Ishii, Kenya Ito, Masayuki Nakanishi | 2020-12-01 |
| 10651057 | Apparatus and method for cleaning a back surface of a substrate | Kenichi Kobayashi, Yu Ishii | 2020-05-12 |