Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854473 | Polishing method, polishing apparatus, and substrate processing system | Yu Ishii, Kenya Ito, Keisuke Uchiyama | 2020-12-01 |
| 10639727 | Vacuum suction pad and substrate holder | Satoru Yamamoto, Kenji Kodera | 2020-05-05 |
| 10632587 | Polishing apparatus and polishing method | Toshifumi Watanabe, Kenji Kodera | 2020-04-28 |
| 10632588 | Polishing apparatus and pressing pad for pressing polishing tool | Kenji Kodera, Yasuyuki MIYASAWA | 2020-04-28 |
| 10543732 | Vehicle air-conditioning unit | — | 2020-01-28 |