Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593570 | Substrate holding module, substrate processing apparatus, and substrate processing method | Akihiro Yazawa, Kenichi Kobayashi | 2020-03-17 |
| 10525564 | Reversing machine and substrate polishing apparatus | Kenichi Kobayashi, Akihiro Yazawa, Manao Hoshina | 2020-01-07 |