Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10799917 | Substrate processing apparatus and substrate processing method | Yu Ishii, Hiroyuki Kawasaki, Kenya Ito, Masako Kodera, Hiroshi Tomita +1 more | 2020-10-13 |
KN
Kenichi Nagaoka
Ebara: 1 patents #85 of 180Top 50%
Overall (2020): #390,372 of 565,922Top 70%
1
Patents 2020