Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10799917 | Substrate processing apparatus and substrate processing method | Yu Ishii, Hiroyuki Kawasaki, Kenichi Nagaoka, Kenya Ito, Masako Kodera +1 more | 2020-10-13 |
| 10586694 | Method for fabricating semiconductor device | Masako Kodera, Hiroshi Tomita | 2020-03-10 |