| 10825652 |
Ion beam etch without need for wafer tilt or rotation |
Ivan L. Berry, III |
2020-11-03 |
| 10804079 |
Active showerhead |
Mariusch Gregor, David Trussell |
2020-10-13 |
| 10784086 |
Cobalt etch back |
Jialing Yang, Baosuo Zhou, Meihua Shen, John Hoang |
2020-09-22 |
| 10784118 |
Atomic layer etching using a combination of plasma and vapor treatments |
Andreas Fischer, Richard Janek, John D. Boniface |
2020-09-22 |
| 10749103 |
Dry plasma etch method to pattern MRAM stack |
Samantha Tan, Taeseung Kim, Wenbing Yang, Jeffrey Marks |
2020-08-18 |
| 10727073 |
Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces |
Samantha Tan, Wenbing Yang, Keren Jacobs Kanarik, Yang Pan |
2020-07-28 |
| 10692724 |
Atomic layer etching methods and apparatus |
David Charles Smith, Andreas Fischer |
2020-06-23 |
| 10580628 |
Differentially pumped reactive gas injector |
Ivan L. Berry, III, Kenneth R. Reynolds |
2020-03-03 |
| 10559475 |
Control of directionality in atomic layer etching |
Andreas Fischer, Richard Janek |
2020-02-11 |
