Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763083 | High energy atomic layer etching | Wenbing Yang, Samantha Tan, Tamal Mukherjee, Yang Pan | 2020-09-01 |
| 10727073 | Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces | Samantha Tan, Wenbing Yang, Thorsten Lill, Yang Pan | 2020-07-28 |
| 10566212 | Designer atomic layer etching | — | 2020-02-18 |
| 10566213 | Atomic layer etching of tantalum | Taeseung Kim | 2020-02-18 |