Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763083 | High energy atomic layer etching | Wenbing Yang, Samantha Tan, Keren Jacobs Kanarik, Yang Pan | 2020-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763083 | High energy atomic layer etching | Wenbing Yang, Samantha Tan, Keren Jacobs Kanarik, Yang Pan | 2020-09-01 |