Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763083 | High energy atomic layer etching | Samantha Tan, Tamal Mukherjee, Keren Jacobs Kanarik, Yang Pan | 2020-09-01 |
| 10749103 | Dry plasma etch method to pattern MRAM stack | Samantha Tan, Taeseung Kim, Jeffrey Marks, Thorsten Lill | 2020-08-18 |
| 10727073 | Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces | Samantha Tan, Keren Jacobs Kanarik, Thorsten Lill, Yang Pan | 2020-07-28 |