Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10749103 | Dry plasma etch method to pattern MRAM stack | Samantha Tan, Wenbing Yang, Jeffrey Marks, Thorsten Lill | 2020-08-18 |
| 10566213 | Atomic layer etching of tantalum | Keren Jacobs Kanarik | 2020-02-18 |