Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825652 | Ion beam etch without need for wafer tilt or rotation | Thorsten Lill | 2020-11-03 |
| 10679868 | Isotropic atomic layer etch for silicon oxides using no activation | Pilyeon Park, Faisal Yaqoob | 2020-06-09 |
| 10580628 | Differentially pumped reactive gas injector | Thorsten Lill, Kenneth R. Reynolds | 2020-03-03 |