Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784118 | Atomic layer etching using a combination of plasma and vapor treatments | Andreas Fischer, Thorsten Lill, John D. Boniface | 2020-09-22 |
| 10559475 | Control of directionality in atomic layer etching | Andreas Fischer, Thorsten Lill | 2020-02-11 |