Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10808310 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Vishwas Kumar Pandey, Edric Tong, Prashanth Vasudeva | 2020-10-20 |
| 10697061 | Two zone flow cooling plate design with concentric or spiral channel for efficient gas distribution assembly cooling | Nisha Prakash Holla, Vijaykumar Krithivasan, Anantha K. Subramani, Hamid Noorbakhsh | 2020-06-30 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2020-04-28 |
| 10626500 | Showerhead design | Chaitanya A. PRASAD, Kevin Joseph Bautista, Jeffrey Tobin, Umesh M. Kelkar, Lara Hawrylchak | 2020-04-21 |
| 10619235 | Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber | Vishwas Kumar Pandey, Edric Tong, Prashanth Vasudeva | 2020-04-14 |
| D877784 | Plasma outlet liner | Dongming Iu, Yanjun Xia | 2020-03-10 |