Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837121 | Susceptor support | Richard O. Collins, David K. Carlson, Mehmet Tugrul Samir | 2020-11-17 |
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Nyi O. Myo, Schubert S. Chu | 2020-09-08 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more | 2020-07-28 |