Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Zhiyuan Ye, Zuoming ZHU, Nyi O. Myo, Errol Antonio C. Sanchez, Schubert S. Chu | 2020-09-08 |
| 10760161 | Inject insert for EPI chamber | Mehmet Tugrul Samir, Aaron Miller | 2020-09-01 |