Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866135 | Methods, systems, and apparatus for mass flow verification based on rate of pressure decay | Justin Hough, Marcel E. Josephson | 2020-12-15 |
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Shu-Kwan LAU, Zuoming ZHU, Nyi O. Myo, Errol Antonio C. Sanchez, Schubert S. Chu | 2020-09-08 |
| 10731272 | Methods and apparatus for deposition processes | Nyi O. Myo, Kevin Joseph Bautista, Schubert S. Chu, Yihwan Kim | 2020-08-04 |
| 10727093 | Light pipe window structure for low pressure thermal processes | Paul Brillhart, Joseph M. Ranish, Aaron Muir Hunter, Edric Tong, James Francis Mack +3 more | 2020-07-28 |
| 10684159 | Methods, systems, and apparatus for mass flow verification based on choked flow | Kevin Brashear, Justin Hough, Jaidev Rajaram, Marcel E. Josephson, Ashley M. Okada | 2020-06-16 |