Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770319 | EPI thickness tuning by pulse or profile spot heating | Shu-Kwan LAU, Zhiyuan Ye, Zuoming ZHU, Errol Antonio C. Sanchez, Schubert S. Chu | 2020-09-08 |
| 10731272 | Methods and apparatus for deposition processes | Kevin Joseph Bautista, Zhiyuan Ye, Schubert S. Chu, Yihwan Kim | 2020-08-04 |