Issued Patents 2020
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837121 | Susceptor support | Richard O. Collins, Errol Antonio C. Sanchez, David K. Carlson | 2020-11-17 |
| 10829855 | Gas distribution showerhead for semiconductor processing | Anh N. Nguyen, Dmitry Lubomirsky | 2020-11-10 |
| 10781533 | Batch processing chamber | — | 2020-09-22 |
| 10760161 | Inject insert for EPI chamber | Shu-Kwan LAU, Aaron Miller | 2020-09-01 |
| 10699921 | Semiconductor processing chamber multistage mixing apparatus | Dongqing Yang | 2020-06-30 |
| 10679870 | Semiconductor processing chamber multistage mixing apparatus | Dongqing Yang | 2020-06-09 |
| 10672642 | Systems and methods for pedestal configuration | Paneendra Prakash Bhat, Nikolai Kalnin | 2020-06-02 |
| 10577690 | Gas distribution showerhead for semiconductor processing | Anh N. Nguyen, Dmitry Lubomirsky | 2020-03-03 |