Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837121 | Susceptor support | Richard O. Collins, Errol Antonio C. Sanchez, Mehmet Tugrul Samir | 2020-11-17 |
| 10586744 | Method for optimizing dry absorber efficiency and lifetime in epitaxial applications | — | 2020-03-10 |
| 10557203 | Temperature control system and process for gaseous precursor delivery | — | 2020-02-11 |