Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10833022 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Xintuo Dai, Sanggil Bae +7 more | 2020-11-10 |
| 10809633 | Overlay control with corrections for lens aberrations | Cheuk Wun Wong, Xintuo Dai, Sanggil Bae | 2020-10-20 |
| 10733354 | System and method employing three-dimensional (3D) emulation of in-kerf optical macros | Hojin Kim, Dong-Ick Lee, Yue Zhou, Jae Ho Joung, Gregory Costrini +2 more | 2020-08-04 |
| 10705435 | Self-referencing and self-calibrating interference pattern overlay measurement | Xintuo Dai, Dongsuk Park, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2020-07-07 |
| 10707175 | Asymmetric overlay mark for overlay measurement | Wei Zhao, Minghao Tang, Rui Chen, Haiting Wang, Erik Geiss +1 more | 2020-07-07 |
| 10635007 | Apparatus and method for aligning integrated circuit layers using multiple grating materials | Keith H. Tabakman, Guanchen He, Xintuo Dai, Xueli Hao | 2020-04-28 |