Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707175 | Asymmetric overlay mark for overlay measurement | Wei Zhao, Minghao Tang, Rui Chen, Dongyue Yang, Haiting Wang +1 more | 2020-07-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707175 | Asymmetric overlay mark for overlay measurement | Wei Zhao, Minghao Tang, Rui Chen, Dongyue Yang, Haiting Wang +1 more | 2020-07-07 |