Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10833022 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Xintuo Dai, Sanggil Bae +7 more | 2020-11-10 |
| 10707175 | Asymmetric overlay mark for overlay measurement | Wei Zhao, Minghao Tang, Dongyue Yang, Haiting Wang, Erik Geiss +1 more | 2020-07-07 |
| 10600914 | Isolation pillar first gate structures and methods of forming same | Wei Zhao, Ming Hao Tang, Haiting Wang, Yuping Ren, Hui Zang +2 more | 2020-03-24 |
| 10566195 | Multiple patterning with variable space mandrel cuts | Jiehui Shu, Jinping Liu | 2020-02-18 |
| 10566291 | Mark structure for aligning layers of integrated circuit structure and methods of forming same | Ming Hao Tang, Yuping Ren, Bradley Morgenfeld, Zheng Chen | 2020-02-18 |