Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10833022 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Sanggil Bae, Rui Chen +7 more | 2020-11-10 |
| 10809633 | Overlay control with corrections for lens aberrations | Dongyue Yang, Cheuk Wun Wong, Sanggil Bae | 2020-10-20 |
| 10705435 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Dongsuk Park, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2020-07-07 |
| 10635007 | Apparatus and method for aligning integrated circuit layers using multiple grating materials | Dongyue Yang, Keith H. Tabakman, Guanchen He, Xueli Hao | 2020-04-28 |