Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809633 | Overlay control with corrections for lens aberrations | Dongyue Yang, Xintuo Dai, Sanggil Bae | 2020-10-20 |
| 10705435 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Dongsuk Park, Minghao Tang, Md Motasim Bellah +1 more | 2020-07-07 |