Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804170 | Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure | Hongliang Shen, Guoxiang Ning, Erfeng Ding, Xiaoxiao Zhang, Lan Yang | 2020-10-13 |
| 10733354 | System and method employing three-dimensional (3D) emulation of in-kerf optical macros | Hojin Kim, Dongyue Yang, Dong-Ick Lee, Yue Zhou, Jae Ho Joung +2 more | 2020-08-04 |
| 10705435 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Minghao Tang, Md Motasim Bellah, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2020-07-07 |