Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804170 | Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure | Guoxiang Ning, Erfeng Ding, Dongsuk Park, Xiaoxiao Zhang, Lan Yang | 2020-10-13 |
| 10580857 | Method to form high performance fin profile for 12LP and above | Yanzhen Wang, Xinyuan Dou, Sipeng Gu | 2020-03-03 |