Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804170 | Device/health of line (HOL) aware eBeam based overlay (EBO OVL) structure | Hongliang Shen, Guoxiang Ning, Erfeng Ding, Dongsuk Park, Lan Yang | 2020-10-13 |
| 10736537 | Electrical impedance spectroscopy measurement based on concentric bipolar microelectrode sensor | Yu-Chong Tai, Tzung K. Hsiai, Yu Zhao, Fei Yu | 2020-08-11 |
| 10617011 | Micro-fabricated group electroplating technique | Yu-Chong Tai, Han-Chieh Chang | 2020-04-07 |