Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10833022 | Structure and method to improve overlay performance in semiconductor devices | Cung D. Tran, Huaxiang Li, Bradley Morgenfeld, Xintuo Dai, Rui Chen +7 more | 2020-11-10 |
| 10809633 | Overlay control with corrections for lens aberrations | Dongyue Yang, Cheuk Wun Wong, Xintuo Dai | 2020-10-20 |