Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854425 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2020-12-01 |
| 10745807 | Showerhead with reduced backside plasma ignition | Haitao Wang, Hamid Noorbakhsh, Chunlei Zhang, Sergio Fukuda Shoji, Kartik Ramaswamy +1 more | 2020-08-18 |
| 10546731 | Method, apparatus and system for wafer dechucking using dynamic voltage sweeping | Haitao Wang, Michael G. Chafin, Kartik Ramaswamy, Yue Guo, Valentin N. Todorow +3 more | 2020-01-28 |