Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502694 | Methods and apparatus for patterned wafer characterization | Stilian Ivanov Pandev, Alexander Kuznetsov, Andrei V. Shchegrov | 2019-12-10 |
| 10352695 | X-ray scatterometry metrology for high aspect ratio structures | Antonio Arion Gellineau, Andrei V. Shchegrov | 2019-07-16 |
| 10325004 | Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu, John J. Hench | 2019-06-18 |
| 10255385 | Model optimization approach based on spectral sensitivity | Stilian Ivanov Pandev, Meng-Fu Shih, Lie-Quan Lee | 2019-04-09 |