Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504759 | Semiconductor metrology with information from multiple processing steps | Alexander Kuznetsov, Andrei V. Shchegrov | 2019-12-10 |
| 10481111 | Calibration of a small angle X-ray scatterometry based metrology system | John J. Hench, Nikolay Artemiev, Joseph A. Di Regolo | 2019-11-19 |
| 10352695 | X-ray scatterometry metrology for high aspect ratio structures | Thaddeus Gerard Dziura, Andrei V. Shchegrov | 2019-07-16 |