Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481111 | Calibration of a small angle X-ray scatterometry based metrology system | John J. Hench, Antonio Arion Gellineau, Nikolay Artemiev | 2019-11-19 |
| 10359377 | Beam shaping slit for small spot size transmission small angle X-ray scatterometry | Alexander N. Bykanov, Nikolay Artemiev, John Viatella | 2019-07-23 |