Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481111 | Calibration of a small angle X-ray scatterometry based metrology system | Antonio Arion Gellineau, Nikolay Artemiev, Joseph A. Di Regolo | 2019-11-19 |
| 10324050 | Measurement system optimization for X-ray based metrology | Andrei V. Shchegrov, Michael S. Bakeman | 2019-06-18 |
| 10325004 | Method of optimizing an optical parametric model for structural analysis using optical critical dimension (OCD) metrology | Thaddeus Gerard Dziura, Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, Xuefeng Liu | 2019-06-18 |