Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359377 | Beam shaping slit for small spot size transmission small angle X-ray scatterometry | Alexander N. Bykanov, Nikolay Artemiev, Joseph A. Di Regolo | 2019-07-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359377 | Beam shaping slit for small spot size transmission small angle X-ray scatterometry | Alexander N. Bykanov, Nikolay Artemiev, Joseph A. Di Regolo | 2019-07-23 |