Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10502694 | Methods and apparatus for patterned wafer characterization | Thaddeus Gerard Dziura, Stilian Ivanov Pandev, Andrei V. Shchegrov | 2019-12-10 |
| 10504759 | Semiconductor metrology with information from multiple processing steps | Antonio Arion Gellineau, Andrei V. Shchegrov | 2019-12-10 |
| 10352876 | Signal response metrology for scatterometry based overlay measurements | Andrei V. Shchegrov, Stilian Ivanov Pandev, Jonathan M. Madsen, Walter D. Mieher | 2019-07-16 |
| 10215559 | Metrology of multiple patterning processes | Stilian Ivanov Pandev, Dzmitry Sanko | 2019-02-26 |