Issued Patents 2019
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10490462 | Metrology systems and methods for process control | Stilian Ivanov Pandev, Andrei V. Shchegrov | 2019-11-26 |
| 10345095 | Model based measurement systems with improved electromagnetic solver performance | Stilian Ivanov Pandev, Leonid Poslavsky, Andrei V. Shchegrov | 2019-07-09 |
| 10295342 | System, method and computer program product for calibration of metrology tools | Stilian Ivanov Pandev | 2019-05-21 |
| 10215559 | Metrology of multiple patterning processes | Stilian Ivanov Pandev, Alexander Kuznetsov | 2019-02-26 |
| 10216096 | Process-sensitive metrology systems and methods | Myungjun Lee, Mark D. Smith, Sanjay Kapasi, Stilian Ivanov Pandev, Pradeep Subrahmanyan +1 more | 2019-02-26 |
| 10210606 | Signal response metrology for image based and scatterometry overlay measurements | Stilian Ivanov Pandev, Wei Lu, Siddharth Srivastava | 2019-02-19 |